Reproducibility of two calibration procedures for phase-measuring deflectometry

被引:5
作者
Allgeier, Stephan [1 ]
Gengenbach, Ulrich [1 ]
Koehler, Bernd [1 ]
Reichert, Klaus-Martin [1 ]
Hagenmeyer, Veit [1 ]
机构
[1] Karlsruhe Inst Technol KIT, Inst Automat & Appl Informat, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany
来源
INTERFEROMETRY XX | 2020年 / 11490卷
关键词
printed electronics; surface inspection; deflectometry; calibration; reproducibility; CIRCUITS;
D O I
10.1117/12.2567092
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Phase-measuring deflectometry is an optical inspection technique for reflective surfaces. It enables absolute, quantitative surface measurements, given a calibrated measurement setup. Two general calibration approaches can be found in literature: First, the stepwise approach uses a calibration pattern and determines internal camera parameters and external geometrical parameters in separate, consecutive steps. Second, the holistic approach optimizes all parameters collectively, based on deflectometric measurements of a calibration mirror. Whereas both approaches have been compared regarding the accuracy of subsequent surface measurements, the present contribution focuses on experimental examination of their reproducibility. In experiment E1, we assess the parameter variability by repeating both calibration procedures ten times. In an additional experiment E2, we repeat all calibration measurements related to a mirror/pattern position ten times in a row before rearranging the mirror/pattern, in order to examine the purely noise-related parameter variability. Finally, we calculate the coordinate variability of a set of world points projected onto the image planes of the calibrated cameras. The measured variability is consistently higher in E1 than in E2 (average ratio: 3.2). Unexpectedly, in both experiments, the external parameter variability also turns out to be higher for the holistic approach compared to stepwise calibration (average ratio: 2.3). This is of importance, since the holistic approach is known from literature to be more accurate than the stepwise approach, regarding their respective application to surface measurements. The image coordinate variability is comparable for both calibration approaches with an average of 0.84 and 0.21 camera pixels for E1 and E2, respectively.
引用
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页数:14
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