Fabrication and structural evaluation of beaded inorganic nanostructures using soft electron-beam lithography

被引：19
作者：
Donthu, Suresh
Sun, Tao
Dravid, Vinayak
机构：
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USA
来源：
ADVANCED MATERIALS | 2007年 / 19卷 / 01期
关键词：
D O I：
10.1002/adma.200601223
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Soft electron-beam lithography, a simple high-resolution patterning technique, is used to fabricate single-grain-wide nanostructures, as seen in the figure, of functional ceramic materials, such as zinc oxide and bismuth ferrite. Structural characterization of these nanostructures reveal that average grain size decreases with line width (see the plot in the figure).
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页码：125 / +
页数：5
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