Characterization of mechanical stress on nanostructures for NEMS applications by ultra-thin membrane and self-suspension techniques

The study of mechanical stress influence on the electronic transport behavior in nanostructures such as nanowires and nanotubes is of particular interest for developing devices in the emerging field of Nano-ElectroMechanical Systems (NEMS). Two techniques for nanostructure actuation are presented: (i) ultrathin membrane actuation and (ii) AFM study of self-suspended nanostructures. The first technique allows in-plane stress of up to a few GPa, while the second allows the imaging and actuation at the same time. (C) 2009 Elsevier B.V. All rights reserved.