Influence of processing parameters on the structure size of microchannel processed by femtosecond laser

被引:30
作者
Lei, Chen [1 ]
Pan, Zhang [2 ]
Chen Jianxiong [3 ]
Tu, Paul [4 ]
机构
[1] Shanghai Maritime Univ, Merchant Marine Coll, Shanghai, Peoples R China
[2] Shanghai Maritime Univ, Logist Engn Coll, Shanghai, Peoples R China
[3] Fuzhou Univ, Sch Mech Engn & Automat, Fuzhou, Fujian, Peoples R China
[4] Univ Calgary, Dept Mech & Mfg Engn, Calgary, AB, Canada
基金
加拿大自然科学与工程研究理事会; 中国博士后科学基金;
关键词
Microchannel milling; Femtosecond laser; Processing parameter; Laser ablation volume; Defocusing distance; CHANNEL;
D O I
10.1016/j.optlastec.2018.03.024
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The processing of an ultra-short pulse laser is widely discussed and used in the field of micro machining, especially for precision processing of the hard and brittle materials. Firstly, the ablation ability would reduce with the defocusing distance increase in theory. However, it was found that the microchannel ablation depth is not sensitive to the defocusing distance in the experiments. The theoretical analysis and simulation calculation were carried out in this paper in order to explain the reason for the relationship between them. Secondly, the size of microchannel structure of the silicon wafer and quartz glass in our experiments were determined obviously by the main processing parameters of femtosecond laser. Furthermore, the influence of laser parameters on the structure size was studied. It was proven that the high quality processed of microchannel depend on the reasonable selection and combination of the parameters by femtosecond laser, which provided an important suggestion to process microchannel precisely. (C) 2018 Elsevier Ltd. All rights reserved.
引用
收藏
页码:47 / 51
页数:5
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