Separate measurement of geometrical thickness and refractive index by an interference confocal microscope

被引：0

作者：

Fukano, T ^{[1
]}

Yamaguchi, I ^{[1
]}

机构：

[1] RIKEN, Inst Phys & Chem Res, Opt Engn Lab, Wako, Saitama 3510198, Japan

来源：

ADVANCED PHOTONIC SENSORS AND APPLICATIONS | 1999年 / 3897卷

关键词：

interferometry; microscopy; thickness measurement; refractive index measurement; wavelength tuning;

D O I：

10.1117/12.369325

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we first survey non-contacting and separate measurement of thickness and refractive index of a transparent plate or film. Then we describe the separate measurement of refractive index and geometrical thickness of multiple layers which uses a combination of confocal microscopy and low-coherence interferometry. The measurement has been accelerated by replacing the low-coherence interferometry by wavelength-scanning heterodyne interferometry using a laser diode. Finally, accuracy of the measurement has been experimentally studied and display of a cross-sectional image of a stack of glass plates has been demonstrated.

引用

页码：342 / 354

页数：3

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