Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

被引：27

作者：

Masood, Adil ^{[1
]}

Pantouvaki, Marianna ^{[2
]}

Goossens, Danny ^{[2
]}

Lepage, Guy ^{[2
]}

Verheyen, Peter ^{[2
]}

Van Campenhout, Joris ^{[2
]}

Absil, Philippe ^{[2
]}

Van Thourhout, Dries ^{[1
]}

Bogaerts, Wim ^{[1
]}

机构：

[1] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp INTEC,Ctr Nano & Biopoton NB Photo, B-9000 Ghent, Belgium

[2] IMEC VZW, B-3001 Louvain, Belgium

来源：

OPTICAL MATERIALS EXPRESS | 2014年 / 4卷 / 07期

关键词：

Tungsten;

D O I：

10.1364/OME.4.001383

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication materials and processes. Static and transient characterizations of heaters are presented. (C)2014 Optical Society of America

引用

页码：1383 / 1388

页数：6

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