Fabrication of patterned organic thin film by low-energy electron beam lithography and surface-initiated ring-opening metathesis polymerization

被引：2

作者：

Ding, Zhebo ^{[1
]}

Ganem, Bruce ^{[1
]}

机构：

[1] Cornell Univ, Dept Chem & Biol Chem, Baker Lab, Ithaca, NY 14853 USA

来源：

CANADIAN JOURNAL OF CHEMISTRY | 2006年 / 84卷 / 10期

关键词：

patterned thin film; e-beam lithography; ring-opening metathesis polymerization; polymer brushes;

D O I：

10.1139/V06-089

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

High densities of immobilized polymer brushes have been created on solid supports in a spatially addressable fashion. Octadecyltrichlorosilane was self-assembled on a silicon substrate to form an inert monolayer. The substrate was then patterned by low-energy electron beam lithography. Finally, the exposed region was back-filled with a second functionalized silane and the pattern was further amplified by surface-initiated ring-opening metathesis polymerization. The patterned substrate was imaged by scanning electron microscopy and atomic force microscopy.

引用

页码：1254 / 1258

页数：5

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