Fabrication of patterned organic thin film by low-energy electron beam lithography and surface-initiated ring-opening metathesis polymerization

被引：2

作者：

Ding, Zhebo ^{[1
]}

Ganem, Bruce ^{[1
]}

机构：

[1] Cornell Univ, Dept Chem & Biol Chem, Baker Lab, Ithaca, NY 14853 USA

来源：

CANADIAN JOURNAL OF CHEMISTRY | 2006年 / 84卷 / 10期

关键词：

patterned thin film; e-beam lithography; ring-opening metathesis polymerization; polymer brushes;

D O I：

10.1139/V06-089

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

High densities of immobilized polymer brushes have been created on solid supports in a spatially addressable fashion. Octadecyltrichlorosilane was self-assembled on a silicon substrate to form an inert monolayer. The substrate was then patterned by low-energy electron beam lithography. Finally, the exposed region was back-filled with a second functionalized silane and the pattern was further amplified by surface-initiated ring-opening metathesis polymerization. The patterned substrate was imaged by scanning electron microscopy and atomic force microscopy.

引用

页码：1254 / 1258

页数：5

共 34 条

[1] Study of the polydispersity of grafted poly(dimethylsiloxane) surfaces using single-molecule atomic force microscopy [J].

Al-Maawali, S ;

Bemis, JE ;

Akhremitchev, BB ;

Leecharoen, R ;

Janesko, BG ;

Walker, GC .

JOURNAL OF PHYSICAL CHEMISTRY B, 2001, 105 (18) :3965-3971

[2] SURFACE ATTACHMENT OF WELL-DEFINED REDOX-ACTIVE POLYMERS AND BLOCK POLYMERS VIA TERMINAL FUNCTIONAL-GROUPS [J].

ALBAGLI, D ;

BAZAN, GC ;

SCHROCK, RR ;

WRIGHTON, MS .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1993, 115 (16) :7328-7334

[3]

Bhatia SN, 1997, J BIOMED MATER RES, V34, P189, DOI 10.1002/(SICI)1097-4636(199702)34:2<189::AID-JBM8>3.0.CO

[4]

2-M

[5] Preparation and characterization of a polyelectrolyte monolayer covalently attached to a planar solid surface [J].

Biesalski, M ;

Rühe, J .

MACROMOLECULES, 1999, 32 (07) :2309-2316

[6]

Grubbs R. H., 2004, Ruthenium-Catalyzed Olefin Metathesis, P153, DOI DOI 10.1002/3527603832.CH6

[7] Olefin metathesis [J].

Grubbs, RH .

TETRAHEDRON, 2004, 60 (34) :7117-7140

[8] Low-energy electron-beam patterning of amine-functionalized self-assembled monolayers [J].

Harnett, CK ;

Satyalakshmi, KM ;

Craighead, HG .

APPLIED PHYSICS LETTERS, 2000, 76 (17) :2466-2468

[9] Bioactive templates fabricated by low-energy electron beam lithography of self-assembled monolayers [J].

Harnett, CK ;

Satyalakshmi, KM ;

Craighead, HG .

LANGMUIR, 2001, 17 (01) :178-182

[10] Surface initiation of living radical polymerization for growth of tethered chains of low polydispersity [J].

Huang, X ;

Wirth, MJ .

MACROMOLECULES, 1999, 32 (05) :1694-1696

← 1 2 3 4 →