Effect of external magnetic field on ion energy density of collisional radio-frequency sheath

被引：0

作者：

Zou Xiu ^{[1
]}

Zou Bin-Yan ^{[1
]}

Liu Hui-Ping ^{[1
]}

机构：

[1] Dalian Jiaotong Univ, Sch Sci, Dalian 116028, Peoples R China

来源：

ACTA PHYSICA SINICA | 2009年 / 58卷 / 09期

基金：

中国国家自然科学基金;

关键词：

plasma; radio-frequency; sheath; magnetic field; PLASMA SHEATH; DYNAMICS;

D O I：

10.7498/aps.58.6392

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A two-fluid model is proposed to describe the collisional radio-frequency plasma sheath in a magnetic field, and the ion energy distribution incident on the radio-frequency sheath biased electrode is numerically investigated. The simulation results reveal that the external magnetic field dominates the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular direction and parallel direction under the action of magnetic field.

引用

页码：6392 / 6396

页数：5

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