Suspended Spiral Inductor and Band-Pass Filter on Thick Anodized Aluminum Oxide

被引：13

作者：

Yook, Jong-Min ^{[1
]}

Kim, Kyoung-Min ^{[1
]}

Kwon, Young-Se ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305701, South Korea

来源：

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2009年 / 19卷 / 10期

关键词：

Air-cavity; anodized aluminum; high Q inductor; suspended inductor; 2.45 GHz band-pass filter (BPF); FABRICATION;

D O I：

10.1109/LMWC.2009.2029735

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We make suspended inductors and 2.45 GHz BPFs on the selectively anodized aluminum. The thick anodized alumina is used as the supporting dielectric and it is easily removed by using chemical wet-etching. The thickness of anodized alumina is 80 m and the depth of the total air-cavity is 200 m. The fabricated inductor over an air cavity has a 25% greater Q factor and 21% higher inductance at 2 GHz compared to an inductor on anodized aluminum. The 2.45 GHz BPF adjusting the suspended inductors has 2.8 dB of insertion loss with a narrow bandwidth.

引用

页码：620 / 622

页数：3

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