Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test

被引：5

作者：

Dang, Nhat Minh ^{[1
]}

Wang, Zhao-Ying ^{[1
]}

Wu, Ti-Yuan ^{[1
]}

Nguyen, Tra Anh Khoa ^{[1
]}

Lin, Ming-Tzer ^{[1
,2
]}

机构：

[1] Natl Chung Hsing Univ Taichung, Grad Inst Precis Engn, Taichung 40749, Taiwan

[2] Natl Chung Hsing Univ, Ctr Adv Sci Technol, Taichung 40749, Taiwan

来源：

MICROMACHINES | 2021年 / 12卷 / 01期

关键词：

shape memory alloys; bulge test; Cr adhesion layer; residual stress;

D O I：

10.3390/mi12010085

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-60at%Ni. Deposition was done using the physical vapor deposition (PVD) process, and the microstructural changes and crystallization phase changes were observed through scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results showed that the TiNi thin film with a Cr adhesion layer had better mechanical properties. The bulge test showed that TiNi thin film with a Cr adhesion had a higher Young's modulus and lower residual stress. From the thermal cycling experiment, it was found that the Cr adhesion layer buffered the mismatch between TiNi and SiNx. Additionally, the thermal cycling test was also used to measure the thermal expansion coefficient of the films, and the fatigue test showed that the Cr layer significantly improved the fatigue resistance of the TiNi film.

引用

页码：1 / 19

页数：19

共 22 条

[21] Reversible surface morphology in shape-memory alloy thin films [J].