Control synthesis for multistage technological processes

被引：0
|
作者：
Pilishkin, VN
Tsaregorodtsev, AV
机构：
来源：
MANUFACTURING, MODELING, MANAGEMENT AND CONTROL, PROCEEDINGS | 2001年
关键词：
non-linear complex object; ion beam etching; phase restrictions; concept of multi-functional belonging; method of phase variation;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The approach of forming the control for the unique type of systems is offered in this work. Most of the technological processes using the ion/electron technology can be applied to this type of systems. The providing of the control aim is based on the forming of the suitable phase restrictions. The fulfilling of these restrictions is based on using some adequate conditions, which can be brought to the algebraic inequalities system. Copyright (C) 2000 IFAC.
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页码：239 / 244
页数：6
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