Differential wavelength-scanning heterodyne interferometer for measuring large step height

被引：22

作者：

Lu, SH ^{[1
]}

Chiueh, CI ^{[1
]}

Lee, CC ^{[1
]}

机构：

[1] Natl Cent Univ, Inst Opt Sci, Tao Yuan 320, Taiwan

来源：

APPLIED OPTICS | 2002年 / 41卷 / 28期

关键词：

D O I：

10.1364/AO.41.005866

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An interferometer based on the differential heterodyne configuration and wavelength-scanning interferometry for measuring large step heights is presented. The proposed interferometer is less sensitive to environmental disturbances than other interferometers and can accurately measure interference phases. A tunable diode laser is utilized to illuminate the interferometer and thus solve the phase ambiguity problem. Counting the interference fringes as the wavelength is scanned through a known change in wavelength directly determines the step height. Three gauge blocks of different lengths, 5, 10, and 50 mm, are individually wrung on a steel plate to simulate large step heights. Comparing the results measured by the proposed interferometer with those by the gauge block interferometer reveals that the accuracy is approximately 100 nm. (C) 2002 Optical Society of America.

引用

页码：5866 / 5871

页数：6

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