Differential wavelength-scanning heterodyne interferometer for measuring large step height

被引：22

作者：

Lu, SH ^{[1
]}

Chiueh, CI ^{[1
]}

Lee, CC ^{[1
]}

机构：

[1] Natl Cent Univ, Inst Opt Sci, Tao Yuan 320, Taiwan

来源：

APPLIED OPTICS | 2002年 / 41卷 / 28期

关键词：

D O I：

10.1364/AO.41.005866

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An interferometer based on the differential heterodyne configuration and wavelength-scanning interferometry for measuring large step heights is presented. The proposed interferometer is less sensitive to environmental disturbances than other interferometers and can accurately measure interference phases. A tunable diode laser is utilized to illuminate the interferometer and thus solve the phase ambiguity problem. Counting the interference fringes as the wavelength is scanned through a known change in wavelength directly determines the step height. Three gauge blocks of different lengths, 5, 10, and 50 mm, are individually wrung on a steel plate to simulate large step heights. Comparing the results measured by the proposed interferometer with those by the gauge block interferometer reveals that the accuracy is approximately 100 nm. (C) 2002 Optical Society of America.

引用

收藏

页码：5866 / 5871

页数：6

相关论文

共 50 条

[31] Scanning differential-heterodyne-interferometer with acousto-optic deflectors [J].

Universitaet Stuttgart, Stuttgart, Germany .

Opt Commun, 1-3 (34-40)

[32] Geometrical tomographic imaging of refractive indices through turbid media by a wavelength-scanning heterodyne interference confocal microscope [J].

Watanabe, Yuuki ;

Yamaguchi, Ichirou .

Applied Optics, 2002, 41 (13) :2414-2419

[33] Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights [J].

Tiziani, HJ ;

Rothe, A ;

Maier, N .

APPLIED OPTICS, 1996, 35 (19) :3525-3533

[34] Wavelength-scanning white-light interferometry with a 3 X 3 coupler-based interferometer [J].

Jiang, Yi .

OPTICS LETTERS, 2008, 33 (16) :1869-1871

[35] Geometrical tomographic imaging of refractive indices through turbid media by a wavelength-scanning heterodyne interference confocal microscope [J].

Watanabe, Y ;

Yamaguchi, I .

APPLIED OPTICS, 2002, 41 (13) :2414-2419

[36] Surface measurement of silicon wafer using harmonic phase-iterative analysis and wavelength-scanning Fizeau interferometer [J].

Kim, Sungtae ;

Kim, Yangjin ;

Sugita, Naohiko ;

Mitsuishi, Mamoru .

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2022, 75 :142-152

[37] Extension of distance measurement range in a sinusoidal wavelength-scanning interferometer using a liquid-crystal wavelength filter with double feedback control [J].

Sasaki, Osami ;

Saito, Akihiro ;

Suzuki, Takamasa ;

Takeda, Mitsuo ;

Kurokawa, Takashi .

APPLIED OPTICS, 2007, 46 (23) :5800-5804

[38] Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer [J].

Hibino, K ;

Oreb, BF ;

Fairman, PS ;

Burke, J .

APPLIED OPTICS, 2004, 43 (06) :1241-1249

[39] Measuring Ultra-Sonic, In-Plane Vibrations with the Scanning Confocal Heterodyne Interferometer [J].

Rembe, C. ;

Ur-Rehman, F. ;

Heimes, F. ;

Boedecker, S. ;

Draebenstedt, A. .

OPTICAL MICRO- AND NANOMETROLOGY III, 2010, 7718

[40] Three-dimensional step-height measurement using sinusoidal wavelength scanning interferometer with four-step phase-shift method [J].

Choi, Samuel ;

Takahashi, Shouhei ;

Sasaki, Osami ;

Suzuki, Takamasa .

OPTICAL ENGINEERING, 2014, 53 (08)

← 1 2 3 4 5 →