High-Performance Piezoresistive Electronic Skin with Bionic Hierarchical Microstructure and Microcracks

被引:185
作者
Nie, Pu [1 ,2 ]
Wang, Ranran [1 ]
Xu, Xiaojuan [1 ,2 ]
Cheng, Yin [1 ,2 ]
Wang, Xiao [1 ,2 ]
Shi, Liangjing [1 ]
Sun, Jing [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, 1295 Ding Xi Rd, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, 19 Yuquan Rd, Beijing 100049, Peoples R China
关键词
electronic Skin; hierarchical microstructure; microcrack; bionic; banana leaf; FLEXIBLE PRESSURE SENSORS; SILVER NANOWIRES; SENSITIVITY; DESIGN; ARRAYS; COMPOSITE; TACTILE; RUBBER; FILMS;
D O I
10.1021/acsami.7b01979
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Electronic skin (E-skin), a popular research topic at present, has achieved significant progress in a variety of sophisticated applications. However, the poor sensitivity and stability severely limit the development of its application. Here, we present a facile, cost-effective, and scalable method for manufacturing E-skin devices with bionic hierarchical microstructure and microcracks. Our devices exhibit high sensitivity (10 kPa(-1)) and excellent durability (10 000 cycles). The synergistic enhancement mechanism of the hierarchical microstructure and the microcracks on the conductive layers was discovered. Moreover, we carried out a series of studies on the airflow detection and the noncontact speech recognition.
引用
收藏
页码:14911 / 14919
页数:9
相关论文
共 42 条
[1]   Linearly and Highly Pressure-Sensitive Electronic Skin Based on a Bioinspired Hierarchical Structural Array [J].
Bae, Geun Yeol ;
Pak, Sang Woo ;
Kim, Daegun ;
Lee, Giwon ;
Kim, Do Hwan ;
Chung, Yoonyoung ;
Cho, Kilwon .
ADVANCED MATERIALS, 2016, 28 (26) :5300-+
[2]   Ultrasensitive, passive and wearable sensors for monitoring human muscle motion and physiological signals [J].
Cai, Feng ;
Yi, Changrui ;
Liu, Shichang ;
Wang, Yan ;
Liu, Lacheng ;
Liu, Xiaoqing ;
Xu, Xuming ;
Wang, Li .
BIOSENSORS & BIOELECTRONICS, 2016, 77 :907-913
[3]   Recent Advances in Flexible and Stretchable Bio-Electronic Devices Integrated with Nanomaterials [J].
Choi, Suji ;
Lee, Hyunjae ;
Ghaffari, Roozbeh ;
Hyeon, Taeghwan ;
Kim, Dae-Hyeong .
ADVANCED MATERIALS, 2016, 28 (22) :4203-4218
[4]   Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer [J].
Choi, Wook ;
Lee, Junwoo ;
Yoo, Yong Kyoung ;
Kang, Sungchul ;
Kim, Jinseok ;
Lee, Jeong Hoon .
APPLIED PHYSICS LETTERS, 2014, 104 (12)
[5]   Highly Stretchable Resistive Pressure Sensors Using a Conductive Elastomeric Composite on a Micropyramid Array [J].
Choong, Chwee-Lin ;
Shim, Mun-Bo ;
Lee, Byoung-Sun ;
Jeon, Sanghun ;
Ko, Dong-Su ;
Kang, Tae-Hyung ;
Bae, Jihyun ;
Lee, Sung Hoon ;
Byun, Kyung-Eun ;
Im, Jungkyun ;
Jeong, Yong Jin ;
Park, Chan Eon ;
Park, Jong-Jin ;
Chung, U-In .
ADVANCED MATERIALS, 2014, 26 (21) :3451-3458
[6]   Skin-inspired electronic devices [J].
Chortos, Alex ;
Bao, Zhenan .
MATERIALS TODAY, 2014, 17 (07) :321-331
[7]   Fabrication of metallic patterns on polydimethylsiloxane using transfer technology: application to MRI microcoils [J].
Couty, M. ;
Nazeer, S. ;
Jelita, C. ;
Martincic, E. ;
Woytasik, M. ;
Ginefri, J-C. ;
Darrasse, L. ;
Tatoulian, M. ;
Dufour-Gergam, E. .
MICRO & NANO LETTERS, 2012, 7 (06) :519-522
[8]   Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring [J].
Dagdeviren, Canan ;
Su, Yewang ;
Joe, Pauline ;
Yona, Raissa ;
Liu, Yuhao ;
Kim, Yun-Soung ;
Huang, YongAn ;
Damadoran, Anoop R. ;
Xia, Jing ;
Martin, Lane W. ;
Huang, Yonggang ;
Rogers, John A. .
NATURE COMMUNICATIONS, 2014, 5
[9]   Capacitive flexible pressure sensor: microfabrication process and experimental characterization [J].
Dinh, T. H. N. ;
Martincic, E. ;
Dufour-Gergam, E. ;
Joubert, P. -Y. .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 22 (03) :465-471
[10]   Transparent Triboelectric Nanogenerators and Self-Powered Pressure Sensors Based on Micropatterned Plastic Films [J].
Fan, Feng-Ru ;
Lin, Long ;
Zhu, Guang ;
Wu, Wenzhuo ;
Zhang, Rui ;
Wang, Zhong Lin .
NANO LETTERS, 2012, 12 (06) :3109-3114