[1] Tohoku Univ, Dept Micronanomachining Res, Aoba Ku, 6-6-01 Aza Aoba, Sendai, Miyagi 9808579, Japan
[2] Nagasaki Inst Appl Sci, Dept Inst Innovat Sci & Technol, Nagasaki 851-0193, Japan
[3] Terumo Co Ltd, Dept Res & Dev Ctr, Shibuya, Tokyo, Japan
[4] Tohoku Univ, Grad Sch Engn, Dept Bioengn & Robot, Sendai, Miyagi 980-8577, Japan