Dislocation effect on crystal-melt interface: an in situ observation of the melting of silicon

被引:8
作者
Wang, YR [1 ]
Kakimoto, K [1 ]
机构
[1] Kyushu Univ, Inst Adv Mat Study, Kasuga, Fukuoka 816, Japan
关键词
silicon; crystal-melt interface; dislocation;
D O I
10.1016/S0022-0248(99)00406-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
X-ray diffraction topography method was employed in order to observe in situ the melting of silicon, attention being focused on the dislocation effect on the shape of crystal-melt interface. In the case of low dislocation density, the melting took place uniformly, and the shape of crystal-melt interface was flat. In the case of high dislocation density, inhomogeneous melting was observed. Therefore, the shape of crystal-melt interface was not flat. The inhomogeneous melting must be related to the existence of large amount of dislocations induced by the thermal stress. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:303 / 312
页数:10
相关论文
共 10 条
[1]  
CHIKAWA J, 1974, J CRYST GROWTH, V24, P61, DOI 10.1016/0022-0248(74)90281-4
[2]   X-RAY DIFFRACTION TOPOGRAPHY WITH A VIDICON TELEVISION IMAGE SYSTEM [J].
CHIKAWA, J ;
FUJIMOTO, I .
APPLIED PHYSICS LETTERS, 1968, 13 (11) :387-&
[3]   MELTING OF SILICON-CRYSTALS AND A POSSIBLE ORIGIN OF SWIRL DEFECTS [J].
CHIKAWA, J ;
SHIRAI, S .
JOURNAL OF CRYSTAL GROWTH, 1977, 39 (02) :328-340
[4]   NEW X-RAY TOPOGRAPHIC TECHNIQUE FOR DETECTION OF SMALL DEFECTS IN HIGHLY PERFECT CRYSTALS [J].
CHIKAWA, JI ;
ASAEDA, Y ;
FUJIMOTO, I .
JOURNAL OF APPLIED PHYSICS, 1970, 41 (05) :1922-&
[5]   SILICON CRYSTALS FREE OF DISLOCATIONS [J].
DASH, WC .
JOURNAL OF APPLIED PHYSICS, 1958, 29 (04) :736-737
[6]  
HURLE DTJ, 1994, HDB CRYSTAL GROWTH A, V2, P149
[7]   THE THEORY AND PRACTICE OF DISLOCATION REDUCTION IN GAAS AND INP [J].
JORDAN, AS ;
VONNEIDA, AR ;
CARUSO, R .
JOURNAL OF CRYSTAL GROWTH, 1984, 70 (1-2) :555-573
[8]   A COMPARATIVE-STUDY OF THERMAL-STRESS INDUCED DISLOCATION GENERATION IN PULLED GAAS, INP, AND SI CRYSTALS [J].
JORDAN, AS ;
CARUSO, R ;
VONNEIDA, AR ;
NIELSEN, JW .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) :3331-3336
[9]  
JORDAN AS, 1986, J CRYST GROWTH, V76, P243
[10]  
VOKL J, 1994, HDB CRYSTAL GROWTH B, V2, pCH14