Amorphous carbon coatings and their tribological behaviour at high temperatures and in high vacuum

被引:33
作者
Krumpiegl, T
Meerkamm, H
Fruth, W
Schaufler, C
Erkens, G
Böhner, H
机构
[1] Univ Erlangen Nurnberg, Chair Engn Design KTmfk, D-91058 Erlangen, Germany
[2] CemeCon GmbH, D-52068 Aachen, Germany
[3] GMN Paul Muller GmbH & Co KG, D-90411 Nurnberg, Germany
关键词
amorphous carbon coatings; diamond-like carbon; high temperature; high vacuum; pin-on-disk tribometer;
D O I
10.1016/S0257-8972(99)00435-1
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The aim of this research work is a comparative study of three different types of amorphous, diamond-like carbon (DLC) coating, performing under high temperature and high vacuum conditions. A series of hard carbon coatings have been produced by PVD magnetron sputtering and plasma decomposition (low-pressure PACVD) using standard in-house equipment. Sputtered amorphous hydrogen free carbon (a-C), r.f. plasma deposited hydrogen containing amorphous carbon (a-C:H) and titanium doped hydrogen containing amorphous carbon (Ti-C:H) have been prepared on steel disks. Different tests have been carried out for the characterisation of the mechanical properties and the tribological behaviour at high temperatures (up to 450 degrees C) and/or in high vacuum (up to 3 x 10(-3) Pa). A recently self-built vacuum pin-on-disk test rig was used for the investigations. The examined tribological coatings show good microhardness and excellent friction properties, when sliding against steel at ambient air. Unfortunately, in high vacuum and at high temperatures the friction coefficients are high and the coatings fail rapidly. After a running-in at ambient air, however, the coatings depict initially ultralow friction in vacuum and during heating. The coefficients of friction fall to values of about 0.02 to 0.04. The results of the tribological model tests will be discussed. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:555 / 560
页数:6
相关论文
共 13 条
  • [1] PREPARATION OF W-C-H COATINGS BY REACTIVE MAGNETRON SPUTTERING
    BEWILOGUA, K
    DIMIGEN, H
    [J]. SURFACE & COATINGS TECHNOLOGY, 1993, 61 (1-3) : 144 - 150
  • [2] Bhushan B., 1991, Handbook of tribology: materials, coatings, and surface treatments
  • [3] Friction control of diamond-like carbon coatings
    Donnet, C
    Grill, A
    [J]. SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) : 456 - 462
  • [4] Advanced solid lubricant coatings for high vacuum environments
    Donnet, C
    [J]. SURFACE & COATINGS TECHNOLOGY, 1996, 80 (1-2) : 151 - 156
  • [5] TRIBOLOGICAL BEHAVIOR OF DIAMOND-LIKE CARBON - EFFECTS OF PREPARATION CONDITIONS AND ANNEALING
    GRILL, A
    PATEL, V
    MEYERSON, B
    [J]. SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3) : 530 - 536
  • [6] Present progress in the development of low friction coatings
    Hirvonen, JP
    Koskinen, J
    Jervis, JR
    Nastasi, M
    [J]. SURFACE & COATINGS TECHNOLOGY, 1996, 80 (1-2) : 139 - 150
  • [7] HOLMBERG K, 1994, COATINGS TRIBOLOGY T, V28
  • [8] THE EFFECTS OF OXYGEN AND HUMIDITY ON FRICTION AND WEAR OF DIAMOND-LIKE CARBON-FILMS
    KIM, DS
    FISCHER, TE
    GALLOIS, B
    [J]. SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3) : 537 - 542
  • [9] Study of formation and some properties of Ti-C:H films prepared by dc magnetron sputtering
    Kulikovsky, VY
    Fendrych, F
    Jastrabik, L
    Chvostova, D
    [J]. SURFACE & COATINGS TECHNOLOGY, 1997, 91 (1-2) : 122 - 130
  • [10] Liu E., 1994, Diamond Films and Technology, V4, P37