Interface and layer periodicity effects on the thermal conductivity of copper-based nanomultilayers with tungsten, tantalum, and tantalum nitride diffusion barriers
Nanomultilayers are complex architectures of materials stacked in sequence with layer thicknesses in the nanometer range. Their application in microelectronics is challenged by their thermal stability, conductivity, and interface reactivity, which can compromise their performance and usability. By using different materials as thermal barriers and by changing their thickness, it is possible to manipulate interfacial effects on thermal transport. In this work, we report on the thermal conductivity of Cu/W, Cu/Ta, and Cu/TaN sputter deposited nanomultilayers with different thicknesses. The resistive interfacial effects are rationalized and discussed also in relation to the structural transformation into a nano-composite upon high-temperature annealing.
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IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Lanzillo, Nicholas A.
Clevenger, Lawrence
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IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Clevenger, Lawrence
Robison, Robert R.
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IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Robison, Robert R.
Edelstein, Daniel C.
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IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
IBM TJ Watson Res Ctr, 1101 Kitchawan Rd, Yorktown Hts, NY 10598 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
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IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Lanzillo, Nicholas A.
Restrepo, Oscar D.
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GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Restrepo, Oscar D.
Bhosale, Prasad S.
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IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Bhosale, Prasad S.
Cruz-Silva, Eduardo
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GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Cruz-Silva, Eduardo
Yang, Chih-Chao
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IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Yang, Chih-Chao
Kim, Byoung Youp
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GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Kim, Byoung Youp
Spooner, Terry
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IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Spooner, Terry
Standaert, Theodorus
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IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Standaert, Theodorus
Child, Craig
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GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Child, Craig
Bonilla, Griselda
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IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
IBM TJ Watson Res Ctr, 1101 Kitchawan Rd, Yorktown Hts, NY 10598 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Bonilla, Griselda
Murali, Kota V. R. M.
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GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
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IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Lanzillo, Nicholas A.
Clevenger, Lawrence
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h-index: 0
机构:
IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Clevenger, Lawrence
Robison, Robert R.
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h-index: 0
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IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Robison, Robert R.
Edelstein, Daniel C.
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h-index: 0
机构:
IBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
IBM TJ Watson Res Ctr, 1101 Kitchawan Rd, Yorktown Hts, NY 10598 USAIBM Res Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
机构:
IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Lanzillo, Nicholas A.
Restrepo, Oscar D.
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h-index: 0
机构:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Restrepo, Oscar D.
Bhosale, Prasad S.
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h-index: 0
机构:
IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Bhosale, Prasad S.
Cruz-Silva, Eduardo
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h-index: 0
机构:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Cruz-Silva, Eduardo
Yang, Chih-Chao
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h-index: 0
机构:
IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Yang, Chih-Chao
Kim, Byoung Youp
论文数: 0引用数: 0
h-index: 0
机构:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Kim, Byoung Youp
Spooner, Terry
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h-index: 0
机构:
IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Spooner, Terry
Standaert, Theodorus
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h-index: 0
机构:
IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Standaert, Theodorus
Child, Craig
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h-index: 0
机构:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Child, Craig
Bonilla, Griselda
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h-index: 0
机构:
IBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
IBM TJ Watson Res Ctr, 1101 Kitchawan Rd, Yorktown Hts, NY 10598 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA
Bonilla, Griselda
Murali, Kota V. R. M.
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h-index: 0
机构:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY 12020 USAIBM Res, Albany Nanotech, 257 Fuller Rd, Albany, NY 12203 USA