Evaluation of electron tomography reconstruction methods for interface roughness measurement

被引：5

作者：

Hayashida, Misa ^{[1
]}

Ogawa, Shinichi ^{[2
]}

Malac, Marek ^{[1
,3
]}

机构：

[1] CNR, Nanotechnol Res Ctr, Edmonton, AB T6G 2M9, Canada

[2] Natl Inst Adv Ind Sci & Technol, Nanoelect Res Inst, Tsukuba, Ibaraki 3058569, Japan

[3] Univ Alberta, Dept Phys, Edmonton, AB T6G 2E1, Canada

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 2018年 / 81卷 / 05期

关键词：

buried interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices; ART; MICROSCOPY;

D O I：

10.1002/jemt.23006

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3 degrees to 5 degrees angle is optimal for the roughness measurement.

引用

页码：515 / 519

页数：5

共 16 条

[1] SIMULTANEOUS ALGEBRAIC RECONSTRUCTION TECHNIQUE (SART) - A SUPERIOR IMPLEMENTATION OF THE ART ALGORITHM [J].

ANDERSEN, AH ;

KAK, AC .

ULTRASONIC IMAGING, 1984, 6 (01) :81-94

[2] 3D imaging of nanomaterials by discrete tomography [J].

Batenburg, K. J. ;

Bals, S. ;

Sijbers, J. ;

Kuebel, C. ;

Midgley, P. A. ;

Hernandez, J. C. ;

Kaiser, U. ;

Encina, E. R. ;

Coronado, E. A. ;

Van Tendeloo, G. .

ULTRAMICROSCOPY, 2009, 109 (06) :730-740

[3] The properties of SIRT, TVM, and DART for 3D imaging of tubular domains in nanocomposite thin-films and sections [J].

Chen, Delei ;

Goris, Bart ;

Bleichrodt, Folkert ;

Mezerji, Hamed Heidari ;

Bals, Sara ;

Batenburg, Kees Joost ;

de With, Gijsbertus ;

Friedrich, Heiner .

ULTRAMICROSCOPY, 2014, 147 :137-148

[4] ITERATIVE METHODS FOR 3-DIMENSIONAL RECONSTRUCTION OF AN OBJECT FROM PROJECTIONS [J].

GILBERT, P .

JOURNAL OF THEORETICAL BIOLOGY, 1972, 36 (01) :105-&

[5] ALGEBRAIC RECONSTRUCTION TECHNIQUES (ART) FOR 3-DIMENSIONAL ELECTRON MICROSCOPY AND X-RAY PHOTOGRAPHY [J].

GORDON, R ;

BENDER, R ;

HERMAN, GT .

JOURNAL OF THEORETICAL BIOLOGY, 1970, 29 (03) :471-&

[6] Advanced reconstruction algorithms for electron tomography: From comparison to combination [J].

Goris, B. ;

Roelandts, T. ;

Batenburg, K. J. ;

Mezerji, H. Heidari ;

Bals, S. .

ULTRAMICROSCOPY, 2013, 127 :40-47

[7] Electron tomography based on a total variation minimization reconstruction technique [J].

Goris, B. ;

Van den Broek, W. ;

Batenburg, K. J. ;

Mezerji, H. Heidari ;

Bals, S. .

ULTRAMICROSCOPY, 2012, 113 :120-130

[8] Practical electron tomography guide: Recent progress and future opportunities [J].

Hayashida, Misa ;

Malac, Marek .

MICRON, 2016, 91 :49-74

[9] Tomographic measurement of buried interface roughness [J].

Hayashida, Misa ;

Ogawa, Shinichi ;

Malac, Marek .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2015, 33 (04)

[10] ART - MATHEMATICS AND APPLICATIONS - REPORT ON MATHEMATICAL FOUNDATIONS AND ON APPLICABILITY TO REAL DATA OF ALGEBRAIC RECONSTRUCTION TECHNIQUES [J].

HERMAN, GT ;

LENT, A ;

ROWLAND, SW .

JOURNAL OF THEORETICAL BIOLOGY, 1973, 42 (01) :1-32

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