AN ELECTRICALLY DECOUPLED LATERAL-AXIS TUNING FORK GYROSCOPE OPERATING AT ATMOSPHERIC PRESSURE

被引：9
作者：
Guo, Z. Y. [1 ]
Lin, L. T.
Zhao, Q. C.
Cui, J.
Chi, X. Z.
Yang, Z. C.
Yan, G. Z.
机构：
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
来源：
IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年
基金：
国家高技术研究发展计划(863计划);
关键词：
D O I：
10.1109/MEMSYS.2009.4805330
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a bulk micromachined lateral axis TFG (tuning fork gyroscope) with torsional sensing comb capacitors is presented. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, then it can work even at atmosphere. Novel driving comb capacitors are used to electrically decouple the mechanical coupling from sensing mode to driving mode. The process for this gyroscope is also compatible with z-axis gyroscope, which makes it potentially to realize low coast monolithic MIMU (miniature inertial measurement unit) without vacuum packaging. The TFG was fabricated and tested at atmosphere. The sensitivity is 17.8mV/degrees/s while the nonlinearity is 0.6%. The bias stability is 0.05 degrees/s (1 sigma) and the noise floor is 0.02 degrees/s/Hz(1/2).
引用
收藏
页码：104 / 107
页数：4
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