The effect of diborane additive on the plasma-chemical properties of deposited carbon films

被引：3
|
作者：
Shubina, E. N. [1 ]
Karasev, P. A. [1 ]
Titov, A. I. [1 ]
Podsvirov, O. A. [1 ]
Vinogradov, A. Ya. [2 ]
Karasev, N. N. [3 ]
Pozdnyakov, A. V. [1 ]
机构：
[1] Peter Great St Petersburg Polytech Univ, St Petersburg 195251, Russia
[2] Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[3] St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg ITMO Univ, St Petersburg 197101, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2017年 / 43卷 / 01期
关键词：
RESIDUAL-STRESS; BORON-CARBIDE;
D O I：
10.1134/S1063785017010114
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We present the results of studies of the optical, electrical, and mechanical properties of diamondlike carbon films prepared by plasma-chemical vapor deposition from a mixture of methane and diborane in various proportions. Upon reaching the threshold concentration (similar to 12%) of diborane in the mixture, inclusions of a new phase start to form in the structure of the films. This leads to nonlinear dependence of the interior stresses and the surface resistance of coatings on the composition of the mixture with minimum values corresponding to a diborane concentration of about 12%.
引用
收藏
页码：81 / 84
页数：4
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