Dynamic Responses of Electrically Driven Quartz Tuning Fork and qPlus Sensor: A Comprehensive Electromechanical Model for Quartz Tuning Fork

被引:9
作者
Lee, Manhee [1 ]
Kim, Bongsu [2 ]
An, Sangmin [2 ]
Jhe, Wonho [2 ]
机构
[1] Chungbuk Natl Univ, Dept Phys, Cheongju 28644, Chungbuk, South Korea
[2] Seoul Natl Univ, Dept Phys & Astron, Seoul 08826, South Korea
基金
新加坡国家研究基金会;
关键词
quartz tuning fork; qPlus; atomic force microscopy; sensor; DISTANCE CONTROL; MICROSCOPY; RESOLUTION;
D O I
10.3390/s19122686
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A quartz tuning fork and its qPlus configuration show different characteristics in their dynamic features, including peak amplitude, resonance frequency, and quality factor. Here, we present an electromechanical model that comprehensively describes the dynamic responses of an electrically driven tuning fork and its qPlus configuration. Based on the model, we theoretically derive and experimentally validate how the peak amplitude, resonance frequency, quality factor, and normalized capacitance are changed when transforming a tuning fork to its qPlus configuration. Furthermore, we introduce two experimentally measurable parameters that are intrinsic for a given tuning fork and not changed by the qPlus configuration. The present model and analysis allow quantitative prediction of the dynamic characteristics in tuning fork and qPlus, and thus could be useful to optimize the sensors' performance.
引用
收藏
页数:11
相关论文
共 30 条
[1]  
Bhushan B., 2007, Applied scanning probe methods VI: characterization
[2]   Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy [J].
Castellanos-Gomez, A. ;
Agrait, N. ;
Rubio-Bollinger, G. .
ULTRAMICROSCOPY, 2011, 111 (03) :186-190
[3]   Dynamics of quartz tuning fork force sensors used in scanning probe microscopy [J].
Castellanos-Gomez, A. ;
Agrait, N. ;
Rubio-Bollinger, G. .
NANOTECHNOLOGY, 2009, 20 (21)
[4]  
Dagdeviren O.E., 2018, ARXIV181208818
[5]   Calibration of the oscillation amplitude of electrically excited scanning probe microscopy sensors [J].
Dagdeviren, Omur E. ;
Miyahara, Yoichi ;
Mascaro, Aaron ;
Grutter, Peter .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (01)
[6]   Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor [J].
Edwards, H ;
Taylor, L ;
Duncan, W ;
Melmed, AJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (03) :980-984
[7]   Dynamic atomic force microscopy methods [J].
García, R ;
Pérez, R .
SURFACE SCIENCE REPORTS, 2002, 47 (6-8) :197-301
[8]   Atomic resolution on Si(111)-(7x7) by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork [J].
Giessibl, FJ .
APPLIED PHYSICS LETTERS, 2000, 76 (11) :1470-1472
[9]   High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork [J].
Giessibl, FJ .
APPLIED PHYSICS LETTERS, 1998, 73 (26) :3956-3958
[10]   Advances in atomic force microscopy [J].
Giessibl, FJ .
REVIEWS OF MODERN PHYSICS, 2003, 75 (03) :949-983