Growth and characterization of bismuth and antimony thin films

被引:6
作者
Martinez, A [1 ]
Collazo, R [1 ]
Berrios, AR [1 ]
Ducoudray, GO [1 ]
机构
[1] UNIV PUERTO RICO,MAT RES CTR,RIO PIEDRAS,PR 00931
关键词
hot-wall epitaxy; bismuth; antimony; thin films;
D O I
10.1016/S0022-0248(97)00042-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A modified hot-wall epitaxy evaporator was used to deposit Bi and Sb thin films onto (111)-oriented Si substrates. Auger electron spectra were taken to establish the purity of the films. X-ray diffraction measurements indicate that the films were polycrystalline and displayed a preferential orientation about the (111) axis in a direction perpendicular to the film plane depending on the substrate temperature during growth.
引用
收藏
页码:845 / 850
页数:6
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