Effect of (Ba plus Sr/Ti) ratio on the dielectric properties for highly (111) oriented (Ba,Sr)TiO3 thin films

被引：17
作者：
Wang, Yi [1 ]
Liu, Baoting [2 ]
Wei, Feng [1 ]
Yang, Zhimin [1 ]
Dua, Jun [1 ]
机构：
[1] Gen Res Inst Nonferrous Met, Adv Elect Mat Inst, Beijing 100088, Peoples R China
[2] Hebei Univ, Coll Phys Sci & Technol, Baoding 071002, Peoples R China
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2009年 / 475卷 / 1-2期
关键词：
Thin films; Dielectric; Magnetron sputtering deposition; Crystal structure; CHEMICAL-VAPOR-DEPOSITION; BUFFER LAYER; TUNABILITY; DEVICES; INTEGRATION; CONSTANT;
D O I：
10.1016/j.jallcom.2008.08.012
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The (1 1 1) oriented barium strontium titanate (BST) thin films have been fabricated at 600 degrees C on platinized Si substrates by RF-magnetron sputtering deposition at various deposition pressures. The crystal structure, surface morphology, and interface of the thin films have been characterized by XRD, FE-SEM, and TEM, respectively. Ba/Sr and (Ba + Sr)/Ti atomic ratios of the films are investigated by inductively coupled plasma spectroscopy. It is found that the dielectric constant and tunability of the obtained films considerably depend on the (Ba+Sr)/Ti ratio. The near-stoichiometry (4% Ti rich) film exhibits a highest dielectric constant and maximum tunability of 682 and 49%, respectively. The large off-stoichiometry film prepared at 20 mTorr has lowest losses (0.0064). (C) 2008 Elsevier B.V. All rights reserved.
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页码：827 / 831
页数：5
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