An over 120 dB wide-dynamic-range 3.0 μm pixel image sensor with in-pixel capacitor of 41.7 fF/um2 and high reliability enabled by BEOL 3D capacitor process

被引：0

作者：

Takase, M. ^{[1
]}

Isono, S. ^{[1
]}

Tomekawa, Y. ^{[1
]}

Koyanagi, T. ^{[1
]}

Tokuhara, T. ^{[1
]}

Harada, M. ^{[1
]}

Inoue, Y. ^{[1
]}

机构：

[1] Panasonic Corp, Technol Innovat Div, Osaka, Japan

来源：

2018 IEEE SYMPOSIUM ON VLSI TECHNOLOGY | 2018年

关键词：

image sensor; capacitor; 3D; BEOL; high reliability and wide dynamic range;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We realized a simultaneous-capture wide-dynamic-range image sensor with 3.0 mu m pixels using novel in-pixel 3D capacitors located in BEOL. We achieved high capacitance density of 41.7 fF/mu m(2) and low leakage current density of 3.6x10(-10) A/cm(2) at 1 V by applying 3D structure and optimizing dielectric deposition process. TDDB investigations showed that estimated failure time at 125 degrees C is more than 10 years. We demonstrated over 120 dB dynamic range image sensor with 3.0 mu m pixels, which is enabled by this BEOL 3D capacitor process technology.

引用

页码：71 / 72

页数：2