Thin Plate Model for Transverse Mode Analysis of Surface Acoustic Wave Devices

被引：3

作者：

Tang, Gongbin ^{[1
,2
]}

Han, Tao ^{[1
]}

Chen, Jing ^{[1
]}

Omori, Tatsuya ^{[2
]}

Hashimoto, Ken-ya ^{[1
,2
]}

机构：

[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Shanghai 200240, Peoples R China

[2] Chiba Univ, Grad Sch Engn, Inage Ku, Chiba, Chiba 2638522, Japan

来源：

2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2015年

关键词：

thin plate model; transverse mode; shear vertical wave; COMSOL;

D O I：

10.1109/ULTSYM.2015.0457

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes a physical model for the analysis of transverse modes in surface acoustic wave (SAW) devices. It is mostly equivalent to the scalar potential (SP) theory, but so flexible to include various effects such as anisotropy, coupling between multiple modes, etc. First, the theory of the two-dimensional wave equation for a shear-vertical bulk wave on an infinitesimally thin piezoelectric plate is investigated. Most of all parameters needed in the model can be derived from those for the 1D coupling-of-mode (COM) model due to their equivalence. To show the effectiveness, the model is applied to the analysis of Al/128 degrees YX-LiNbO3 substrate structure, and the simulation results are in good agreement with analytical result.

引用

页数：4

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