An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

被引：12

作者：

Ju, Guangxu ^{[1
]}

Highland, Matthew J. ^{[1
]}

Yanguas-Gil, Angel ^{[2
]}

Thompson, Carol ^{[3
]}

Eastman, Jeffrey A. ^{[1
]}

Zhou, Hua ^{[4
]}

Brennan, Sean M. ^{[5
]}

Stephenson, G. Brian ^{[1
]}

Fuoss, Paul H. ^{[1
]}

机构：

[1] Argonne Natl Lab, Div Mat Sci, 9700 S Cass Ave, Argonne, IL 60439 USA

[2] Argonne Natl Lab, Div Energy Syst, 9700 S Cass Ave, Argonne, IL 60439 USA

[3] Northern Illinois Univ, Dept Phys, De Kalb, IL 60115 USA

[4] Argonne Natl Lab, Xray Sci Div, 9700 S Cass Ave, Argonne, IL 60439 USA

[5] Fairview Associates, Jackson, WY 83002 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2017年 / 88卷 / 03期

关键词：

THERMAL-CONDUCTIVITY; GAN; SCATTERING; GROWTH; DIFFRACTION; NUCLEATION; DEPOSITION;

D O I：

10.1063/1.4978656

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes. Published by AIP Publishing.

引用

页数：13

共 37 条

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