On the use of dust plasma acoustic waves for the diagnostic of nanometer-sized contaminant particles in plasmas

被引：17

作者：

Kortshagen, U

机构：

[1] Department of Mechanical Engineering, University of Minnesota, Minneapolis

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 02期

关键词：

D O I：

10.1063/1.119502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

During the phase of dust nucleation in plasma enhanced chemical vapor deposition systems, nanometer-sized dust particles appear in large concentrations, The dispersion characteristics of dust acoustic waves in such a plasma during the nucleation phase is analyzed. It is shown that the dispersion properties of the dust acoustic wave depend sensitively on the particle size. It is proposed to use dust acoustic waves as a novel particle size diagnostic for nanometer-sized particles, (C) 1997 American Institute of Physics.

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页码：208 / 210

页数：3

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