The Study of a Micro Channel Integrated Gas Flow Sensor

In this paper, a micro channel with integrated gas mass flow sensor is proposed for high sensitivity. The uniqueness of this flow sensor is that there is thermal convection effect on two sides of diaphragm, which results in a more sensitive temperature distribution. Flow and temperature characteristics of the novel flow sensor are simulated at different flow rates. The most sensitive position is obtained, and optimum d is 120 mu m-200 mu m when the flow velocity varies from 0m/s to 5m/s. Compared with traditional flow sensors, this flow sensor has higher measurement precision. The micro channel integrated gas mass flow sensor is fabricated by semiconductor technology, and the improvement of output signal by flow guide is obvious. When the incoming flow is 5m/s, the output signal can reaches about 4.2V and 3V for the flow sensing with and without flow guide.