Humidity Sensing of Ordered Macroporous Silicon With HfO2 Thin-Film Surface Coating

被引：7

作者：

Wang, Yun ^{[1
]}

Yeow, John T. W. ^{[1
]}

机构：

[1] Univ Waterloo, Dept Syst Design Engn, Waterloo, ON N2L 3G1, Canada

来源：

IEEE SENSORS JOURNAL | 2009年 / 9卷 / 5-6期

基金：

加拿大自然科学与工程研究理事会;

关键词：

Hafnium oxide; humidity sensor; ordered porous silicon (PS); surface modification; POROUS SILICON; SENSORS; ADSORPTION;

D O I：

10.1109/JSEN.2009.2016602

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Porous silicon (PS), as a gas/chemical sensing material, has been widely investigated. In this paper, the humidity sensing characteristics of n-type macroporous silicon with ordered structure and metal oxide thin-film coating is studied. The ordered PS has uniform pore size, pore shape and distribution. All pores are aligned vertically and open to the environment. The PS heterostructure (PS/Si substrate) and self-supporting membrane are fabricated and their resistance responses are measured under room temperature. A resistance variation of 23.5% and 28.3% for each structure are obtained, respectively. Surface modification for sensing enhancement is also investigated. The resistance and capacitance responses of ordered PS heterostructure with HfO2 thin-film coating are characterized. The HfO2 modified PS show high sensing variation and near-linear response to a wide range of relative humidity (RH). It is also demonstrated that PS with HfO2 thin-film coating is able to sense the RH change faster than a commercial humidity sensor. To the best of our knowledge, this is the first time that humidity sensing with ordered porous silicon and HfO2 thin-film is reported. Possible sensing mechanisms and future work are also discussed.

引用

页码：541 / 547

页数：7

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