Piezoresistive AFM cantilevers surpassing standard optical beam deflection in low noise topography imaging

被引:72
作者
Dukic, Maja [1 ]
Adams, Jonathan D. [1 ]
Fantner, Georg E. [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Lab Bio & Nanoinstrumentat, CH-1015 Lausanne, Switzerland
来源
SCIENTIFIC REPORTS | 2015年 / 5卷
基金
欧洲研究理事会;
关键词
ATOMIC-FORCE MICROSCOPE; SENSOR; RESOLUTION; PROBE; MICROCANTILEVERS; FABRICATION;
D O I
10.1038/srep16393
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Optical beam deflection (OBD) is the most prevalent method for measuring cantilever deflections in atomic force microscopy (AFM), mainly due to its excellent noise performance. In contrast, piezoresistive strain-sensing techniques provide benefits over OBD in readout size and the ability to image in light-sensitive or opaque environments, but traditionally have worse noise performance. Miniaturisation of cantilevers, however, brings much greater benefit to the noise performance of piezoresistive sensing than to OBD. In this paper, we show both theoretically and experimentally that by using small-sized piezoresistive cantilevers, the AFM imaging noise equal or lower than the OBD readout noise is feasible, at standard scanning speeds and power dissipation. We demonstrate that with both readouts we achieve a system noise of approximate to 0.3 angstrom at 20 kHz measurement bandwidth. Finally, we show that small-sized piezoresistive cantilevers are well suited for piezoresistive nanoscale imaging of biological and solid state samples in air.
引用
收藏
页数:11
相关论文
共 59 条
[1]   High-speed imaging upgrade for a standard sample scanning atomic force microscope using small cantilevers [J].
Adams, Jonathan D. ;
Nievergelt, Adrian ;
Erickson, Blake W. ;
Yang, Chen ;
Dukic, Maja ;
Fantner, Georg E. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (09)
[2]   Scanning probe arrays for life sciences and nanobiology applications [J].
Aeschimann, L ;
Meister, A ;
Akiyama, T ;
Chui, BW ;
Niedermann, P ;
Heinzelmann, H ;
De Rooij, NF ;
Staufer, U ;
Vettiger, P .
MICROELECTRONIC ENGINEERING, 2006, 83 (4-9) :1698-1701
[3]   AN ATOMIC-RESOLUTION ATOMIC-FORCE MICROSCOPE IMPLEMENTED USING AN OPTICAL-LEVER [J].
ALEXANDER, S ;
HELLEMANS, L ;
MARTI, O ;
SCHNEIR, J ;
ELINGS, V ;
HANSMA, PK ;
LONGMIRE, M ;
GURLEY, J .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :164-167
[4]   Self-sensing micro- and nanocantilevers with attonewton-scale force resolution [J].
Arlett, J. L. ;
Maloney, J. R. ;
Gudlewski, B. ;
Muluneh, M. ;
Roukes, M. L. .
NANO LETTERS, 2006, 6 (05) :1000-1006
[5]   Sensitive detection of nanomechanical motion using piezoresistive signal downmixing [J].
Bargatin, I ;
Myers, EB ;
Arlett, J ;
Gudlewski, B ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 2005, 86 (13) :1-3
[6]   Piezoresistive cantilevers for nanomechanical sensing [J].
Bausells, Joan .
MICROELECTRONIC ENGINEERING, 2015, 145 :9-20
[7]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[8]   Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors [J].
Blanc, N ;
Brugger, J ;
deRooij, NF ;
Durig, U .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02) :901-905
[9]   A single electron transistor on an atomic force microscope probe [J].
Brenning, Henrik T. A. ;
Kubatkin, Sergey E. ;
Erts, Donats ;
Kafanov, Sergey G. ;
Bauch, Thilo ;
Delsing, Per .
NANO LETTERS, 2006, 6 (05) :937-941
[10]  
Brugger J., 1992, Journal of Micromechanics and Microengineering, V2, P218, DOI 10.1088/0960-1317/2/3/026