Electrical and optical behavior of Al2O3/Porous silicon/silicon structures

被引：2
|
作者：
Gabouze, N. [1 ]
Ait-hamouda, K. [1 ]
机构：
[1] Unite Dev Technol Silicium, Algiers, Algeria
来源：
THIN FILMS AND POROUS MATERIALS | 2009年 / 609卷
关键词：
Alumina; Porous silicon; Photodetector; Optical filter; Spectral sensitivity; FILMS; FILTERS;
D O I：
10.4028/www.scientific.net/MSF.609.213
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, a promising class of optical filters is introduced, based on Al2O3/PS/Si structure. The filters consist of thin layer of aluminium electrochemically oxidized in different aqueous solution, on porous silicon. The spectral sensitivity can be easily varied by Al2O3 thickness. This result is a consequence of refractive index variation of Al2O3 and PS layers, confirmed by ellipsometry measurements.
引用
收藏
页码：213 / 219
页数：7
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