Optical properties from SRSO/SiO2 multilayers in planar microcavities

被引：3

作者：

Belarouci, A. ^{[1
]}

Gourbilleau, F. ^{[1
]}

Rizk, R. ^{[1
]}

机构：

[1] ENSICAEN, CNRS, UMR 6176, SIFCOM, F-14050 Caen, France

来源：

JOURNAL OF LUMINESCENCE | 2006年 / 121卷 / 02期

关键词：

microcavity; spontaneous emission control; silicon nanocrystals;

D O I：

10.1016/j.jlumin.2006.08.026

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on the fabrication and characterization of an efficient and CMOS compatible Si-based light source. Silicon-rich silicon oxide (SRSO)/SiO2 superlattices-doped planar optical microcavities have been grown by reactive magnetron sputtering. The devices were studied using reflectance and photoluminescence measurements. The reflectivity of the resonator is above 99.9% and the quality factor is reaching a value of 100. Modification of silicon nanocrystals emission is clearly observed in the visible and reveals narrow, intense and highly directional emission properties. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：282 / 285

页数：4

共 18 条

[1] Size-dependent electron-hole exchange interaction in Si nanocrystals [J].

Brongersma, ML ;

Kik, PG ;

Polman, A ;

Min, KS ;

Atwater, HA .

APPLIED PHYSICS LETTERS, 2000, 76 (03) :351-353

[2] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].

CANHAM, LT .

APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048

[3] Spectroscopic ellipsometry analyses of sputtered Si/SiO2 nanostructures [J].

Charvet, S ;

Madelon, R ;

Gourbilleau, F ;

Rizk, R .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) :4032-4039

[4] Influence of sample oxidation on the nature of optical luminescence from porous silicon [J].

Coulthard, I ;

Antel, WJ ;

Freeland, JW ;

Sham, TK ;

Naftel, SJ ;

Zhang, P .

APPLIED PHYSICS LETTERS, 2000, 77 (04) :498-500

[5] Si-rich/SiO2 nanostructured multilayers by reactive magnetron sputtering [J].

Gourbilleau, F ;

Portier, X ;

Ternon, C ;

Voivenel, P ;

Madelon, R ;

Rizk, R .

APPLIED PHYSICS LETTERS, 2001, 78 (20) :3058-3060

[6] Correlation between luminescence and structural properties of Si nanocrystals [J].

Iacona, F ;

Franzò, G ;

Spinella, C .

JOURNAL OF APPLIED PHYSICS, 2000, 87 (03) :1295-1303

[7] Luminescence properties of Si nanocrystals embedded in optical microcavities [J].

Iacona, F ;

Franzò, G ;

Moreira, EC ;

Pacifici, D ;

Irrera, A ;

Priolo, F .

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 19 (1-2) :377-381

[8] Size effects on the luminescence spectrum in amorphous Si/SiO2 multilayer structures [J].

Kanemitsu, Y ;

Kushida, T .

APPLIED PHYSICS LETTERS, 2000, 77 (22) :3550-3552

[9] LUMINESCENCE PROPERTIES OF NANOMETER-SIZED SI CRYSTALLITES - CORE AND SURFACE-STATES [J].

KANEMITSU, Y .

PHYSICAL REVIEW B, 1994, 49 (23) :16845-16848

[10] The origin of photoluminescence from thin films of silicon-rich silica [J].

Kenyon, AJ ;

Trwoga, PF ;

Pitt, CW ;

Rehm, G .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (12) :9291-9300

← 1 2 →