1013 Conformal Doping for Highly Efficient Thermal Neutron Detectors

被引：5

作者：

Krishnan, Siddartha S. Nandagopala ^{[1
]}

Avila-Avendano, Carlos ^{[1
]}

Shamsi, Zeshaan ^{[1
]}

Caraveo-Frescas, Jesus A. ^{[1
]}

Quevedo-Lopez, Manuel A. ^{[1
]}

机构：

[1] Univ Texas Dallas, Mat Sci & Engn, Richardson, TX 75080 USA

来源：

ACS SENSORS | 2020年 / 5卷 / 09期

关键词：

neutron detection; B-10; doping; Monte-Carlo simulations; micro-structured detection; solid-state neutron sensor; DESIGN;

D O I：

10.1021/acssensors.0c01013

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This paper reports a simple and novel conformal doping strategy for microstructured silicon diodes using enriched B-10 for sidewall doping while enabling enhanced neutron sensitivity. Monte-Carlo nuclear particle (MCNP) code simulations were initially used to calculate the neutron detection efficiency in the microstructured diodes as a function of geometry and pitch. A high-temperature anneal in 10B-filled diodes results in a conformal silicon p+ layer along the side walls of the trenches in the diodes. This results in large neutron detection areas and enhanced neutron detection efficiency when compared with planar detectors. With the method discussed here, a thermal neutron detection of similar to 21% efficiency is achieved, which is significantly higher than the efficiency achieved in planar detectors (similar to 3.5%). The higher efficiency is enabled by the 10B acting as a source for conformal doping in the trenches, resulting in lower leakage current while also enabling neutron sensitivity in the microstructured diodes.

引用

页码：2852 / 2857

页数：6

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