Surface Modification Of PMMA With DLC Using RF-PECVD

被引:3
作者
Barhai, P. K. [1 ]
Sharma, Rishi [1 ]
Yadav, Anoop Kr. [1 ]
Singh, Ashwini Kr. [1 ]
Gaur, Himani [2 ]
Buck, Volker [2 ]
机构
[1] Birla Inst Technol, Dept Appl Phys, Ranchi 835215, Bihar, India
[2] Univ Duisburg, Thin film technol Group, Dept Phys, 47048 Duisburg, Germany
来源
EUROCVD 17 / CVD 17 | 2009年 / 25卷 / 08期
关键词
DIAMOND-LIKE CARBON; BONE-CEMENT; IN-VITRO; FILMS; COATINGS; BIOCOMPATIBILITY; DEPOSITION; STEEL; WEAR;
D O I
10.1149/1.3207673
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
DLC films are deposited on PMMA substrates using Radio Frequency Plasma Enhanced Chemical Vapour Deposition (RF-PECVD) technique with the variation of RF power at a constant pressure of 5 x 10(-2) mbar. Acetylene diluted with argon is used as a precursor for the deposition of DLC films. No external heating is provided during deposition. Deposited films are characterized using Raman spectroscopy, FTIR spectroscopy, Optical contact angle (OCA) technique and AFM. Raman spectra shows a G peak near 1550 cm(-1) and a D peak near 1320 cm(-1). FTIR spectra shows a peak near 2900 cm(-1) corresponding to C-H stretching modes and peaks below 2000 cm(-1) corresponding to C-C modes and C-H bending modes. Surface morphology of the films has been studied with AFM and the result shows the formation of uniform films. Optical contact angle (OCA) shows that DLC coated PMMA is more hydrophobic compared to uncoated surface.
引用
收藏
页码:829 / 836
页数:8
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