Resistance and Wear Resistance Control in ZnO Substrates for Electrostatic Discharge-Safe Ceramics Through Variation of Sintering Temperature and Additives

被引：5

作者：

Kang, Jae Won ^{[1
,2
]}

Lee, Chang Hyun ^{[1
]}

Shin, Hyo Soon ^{[1
]}

Yeo, Dong Hun ^{[3
]}

Jeong, Dae Yong ^{[2
]}

机构：

[1] Korea Inst Ceram Engn & Technol, Adv Mat Convergence Div, 101 Sohoro, Jinju, South Korea

[2] Inha Univ, Sch Mat Sci & Engn, Incheon 402751, South Korea

[3] Korea Inst Ceram Engn & Technol, Engn Ceram, 3321 Gyeongchung Daero, Sindun Myeon, Icheon, South Korea

来源：

NANOSCIENCE AND NANOTECHNOLOGY LETTERS | 2017年 / 9卷 / 01期

关键词：

ZnO; ESD; Resistance; Wear Resistance; Thick Film Process; IGNITION;

D O I：

10.1166/nnl.2017.2305

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

With development towards fine processing in semiconductor fabrication, electrostatic discharge (ESD) in the manufacturing process is becoming a greater problem. This study aimed to develop a composition for ESD-safe ceramic substrates with controllable resistance, outstanding wear resistance, and low cost. The relatively affordable material ZnO was chosen from among semiconducting ceramic materials and a variety of additives were tested to derive optimal sintering conditions. The Al2O3 additive reacted with ZnO to form ZnAl2O4, which led to an increase in wear resistance. The addition of Mn, Cr, and Co ions led to an increase in resistance. The highest resistance was observed in ZnO mixed with 10 vol% of Al2O3 sintered at 1250 degrees C, combined with Mn3O4 1 wt% and Cr2O3 2 wt% in the process. The derived optimal composition will be suitable for the manufacture of ESD-safe ceramic substrates.

引用

页码：85 / 88

页数：4