Evaluating mass-flow controller technology to improve process capability

被引：0
作者：
Shriner, JC [1 ]
Leggett, GH [1 ]
Savadkouhi, J [1 ]
机构：
[1] Texas Instruments Kilby Ctr, Dallas, TX USA
来源：
MICRO | 2002年 / 20卷 / 05期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：39 / +
页数：6
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