Evaluating mass-flow controller technology to improve process capability

被引：0

作者：

Shriner, JC ^{[1
]}

Leggett, GH ^{[1
]}

Savadkouhi, J ^{[1
]}

机构：

[1] Texas Instruments Kilby Ctr, Dallas, TX USA

来源：

MICRO | 2002年 / 20卷 / 05期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：39 / +

页数：6

共 50 条

[21] DEVELOPMENTS IN MASS-FLOW POROMETRY [J].

MEIDNER, H .

JOURNAL OF EXPERIMENTAL BOTANY, 1992, 43 (255) :1309-1314

[22] MASS-FLOW AND THE BOTTOM LINE [J].

STEINBERG, B .

MEASUREMENTS & CONTROL, 1995, (172) :236-237

[23] ON THE CRITERIA FOR MASS-FLOW IN HOPPERS [J].

DRESCHER, A .

POWDER TECHNOLOGY, 1992, 73 (03) :251-260

[24] Stainless steel-based integrated mass-flow controller for reactive and corrosive gases [J].

Hirata, K ;

Esashi, M .

SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 :33-38

[25] MASS-FLOW MEASUREMENTS IN DUST [J].

ALBERTZ, T .

TECHNISCHES MESSEN, 1980, 47 (04) :137-140

[26] SELF-LEARNING FUZZY-LOGIC SYSTEM FOR IN-SITU, IN-PROCESS DIAGNOSTICS OF MASS-FLOW CONTROLLER (MFC) [J].

RAMAMURTHI, RK .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1994, 7 (01) :42-52

[27] Stainless steel-based integrated mass-flow controller for reactive and corrosive gases [J].

Hirata, K ;

Sim, DY ;

Esashi, M .

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, :962-965

[28] FLOW METERING SURVEY - VOLUME OR MASS-FLOW [J].

MERRETT, J .

CONTROL AND INSTRUMENTATION, 1995, 27 (11) :25-&

[29] WALL STRESSES IN MASS-FLOW BUNKERS [J].

BRANSBY, PL ;

BLAIRFIS.PM .

CHEMICAL ENGINEERING SCIENCE, 1974, 29 (05) :1061-1074

[30] FEEDING SOLIDS WITH MASS-FLOW BINS [J].

JENIKE, AW ;

CARSON, JW .

CHEMICAL ENGINEERING PROGRESS, 1975, 71 (02) :69-70

← 1 2 3 4 5 →