Evaluating mass-flow controller technology to improve process capability

被引：0

|

作者：

Shriner, JC ^{[1
]}

Leggett, GH ^{[1
]}

Savadkouhi, J ^{[1
]}

机构：

[1] Texas Instruments Kilby Ctr, Dallas, TX USA

来源：

MICRO | 2002年 / 20卷 / 05期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：39 / +

页数：6

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