Phase Shifter Design Based on Fast RF MEMS Switched Capacitors

被引：0

作者：

Lacroix, Benjamin ^{[1
]}

Pothier, Arnaud ^{[1
]}

Crunteanu, Aurelian ^{[1
]}

Blondy, Pierre ^{[1
]}

机构：

[1] Univ Limoges, CNRS, XLIM UMR 6172, F-87060 Limoges, France

来源：

2008 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3 | 2008年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design and fabrication of fast DMTL RF MEMS phase shifters. Distributed MEMS Transmission Lines are being used with miniature RF MEMS switched capacitors (40x40 mu m 2), actuating at 25 V with a switching time around 1 mu s. Both 90 and 180 degree phase shifters presented here operate at 20 GHz, are respectively less than 4.5 mm and 8.5 mm long. They are designed with 6 and 12 unit cells to achieve the desired phase shift. Measured return loss is respectively better than -13 dB and -11 dB for the 90 and the 180 degree phase shifters, and insertion loss is respectively less than 0.8 dB and 1.8 dB at 20 GHz.

引用

页码：802 / 805

页数：4

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