Comparison of parametric and profilometric surface analysis methods on machined surfaces

被引:6
作者
Boehm, J. [1 ]
Jech, M. [1 ]
Vorlaufer, G. [1 ]
Vellekoop, M. [2 ]
机构
[1] AC2T Res GmbH, Austrian Ctr Competence Tribol, A-2700 Wiener Neustadt, Austria
[2] Vienna Univ Technol, Inst Sensors & Actuator Syst, A-1040 Vienna, Austria
关键词
surface analysis; scattering light sensor; atomic force microscope; confocal microscope; roughness parameters; TIP;
D O I
10.1243/13506501JET532
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
In this work, a comparison of three different methods for analysing topographies and roughness on machined metal surfaces is presented. To obtain comparable results, the measurements were done on one and the same set of samples. For this purpose, an atomic force microscope (AFM), a confocal white light microscope, and a scattering light system were used to analyse the topography of samples of the same material, but with the topographies occurring step by step from the grinding process to the polishing process. Based on the results of the investigations with the parametric system (scattering light sensor) and the profilometric systems (AFM, confocal white light microscope), we established a correlation between the roughness parameters and the scattering light parameter. It is shown that the different methods lead to different roughness parameters of the same surface.
引用
收藏
页码:799 / 805
页数:7
相关论文
共 16 条
  • [1] [Anonymous], 1987, SCATTERING ELECTROMA
  • [2] *ASME DIN, 2002, 4768 ASME DIN
  • [3] *ASME DIN EN ISO, 2002, 4287 ASME DIN EN ISO
  • [4] Surface state analysis by means of confocal microscopy
    Becker, JM
    Grousson, S
    Jourlin, M
    [J]. CEMENT & CONCRETE COMPOSITES, 2001, 23 (2-3) : 255 - 259
  • [5] Bhushan B., 2005, NANOTRIBOLOGY NANOME
  • [6] BLATEYRON F, 2006, P JSPE MARCH DIG SUR
  • [7] OPTICAL ROUGHNESS MEASURING INSTRUMENT FOR FINE-MACHINED SURFACES
    BRODMANN, R
    GERSTORFER, O
    THURN, G
    [J]. OPTICAL ENGINEERING, 1985, 24 (03) : 408 - 413
  • [8] BRODMANN R, 2004, P INT C SURF METR CH
  • [9] Roughness parameters
    Gadelmawla, ES
    Koura, MM
    Maksoud, TMA
    Elewa, IM
    Soliman, HH
    [J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2002, 123 (01) : 133 - 145
  • [10] TRIBOSCOPIC DESCRIPTION OF LOCAL WEAR PHENOMENA UNDER AN AFM TIP
    LOUBET, JL
    BELIN, M
    DURAND, R
    PASCAL, H
    [J]. THIN SOLID FILMS, 1994, 253 (1-2) : 194 - 198