Numerical simulation of an electron cyclotron resonance plasma source

被引：6

作者：

Liu, MH ^{[1
]}

Hu, XW

Wu, QC

Yu, GY

机构：

[1] Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China

[2] Univ Sci & Technol China, Dept Modern Phys, Hefei 230026, Peoples R China

来源：

ACTA PHYSICA SINICA | 2000年 / 49卷 / 03期

关键词：

D O I：

10.7498/aps.49.497

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Using a two-dimensional hybrid-model with self-consistent microwave absorption, the variations of plasma parameters such as ionization rate, plasma density, plasma potential, and electron temperature with operation conditions were studied. Results of simulation show that nonlinear phenomena such as region character, saturation, and oscillation of plasma parameters can be developed when the operation conditions (pressure, power) were changed.

引用

页码：497 / 501

页数：5

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