Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem

被引：10

作者：

Rakotondrabe, Micky ^{[1
]}

Haddab, Yassine ^{[1
]}

Lutz, Philippe ^{[1
]}

机构：

[1] Univ Franche Comte, ENSMM, Lab Automat Besancon, CNRS UMR6596, 24 Rue Alain Savary, F-25000 Besancon, France

来源：

2006 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), VOLS 1-10 | 2006年

关键词：

micromanipulation system; angular and linear motions; piezoelectric actuator; design and development; stick-slip;

D O I：

10.1109/ROBOT.2006.1641787

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents the design, the development and the experiments on a two degrees of freedom (2DoF) microsystem. The originality of the microsystem is its ability to do angular and linear motions independently with a very high stroke and a submicrometric precision. The target performances are first presented. Afterwards the stick-slip piezoelectric microactuators that are used are presented. Then, their integration inside the microsystem is detailed. Finally, results of experiments are given.

引用

页码：669 / +

页数：2