Optic fiber sensors fabricated by laser-micromachining

被引:25
作者
Rao, Yun-Jiang [1 ]
Ran, Zeng-Ling [1 ]
机构
[1] Univ Elect Sci & Technol China, Key Lab Opt Fiber Sensing & Commun, Minist Educ, Chengdu 610054, Sichuan, Peoples R China
基金
中国国家自然科学基金;
关键词
Optic fiber sensors; Laser-micromachining; Femtosecond laser; Excimer laser; Fiber grating; Interferometer; FABRY-PEROT-INTERFEROMETER; LONG-PERIOD GRATINGS; BRAGG GRATINGS; HIGH-TEMPERATURE; PURE SILICA; IRRADIATION;
D O I
10.1016/j.yofte.2013.07.016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Recent progress in using excimer and femtosecond lasers to fabricate functional fiber-optic sensing devices is reviewed extensively in this paper. The application of femtosecond lasers is to fabricate fiber gratings and in-line fiber-optic interferometers for measurements of strain, temperature and refractive index. The application of 157 nm excimer lasers is to create fiber gratings and in-line fiber interferometers for measurements of strain, acceleration, pressure, temperature and refractive index. Compared with conventional optical fiber sensors, these novel micro optical fiber sensors fabricated by laser-micromachining have outstanding advantages, such as fast and direct formation, easy mass-production with ultra-low-cost, good reproducibility, excellent optical performance, low temperature cross-sensitivity, etc., which pave a way to form a new generation of miniature fiber-optic sensors for many applications. (C) 2013 Elsevier Inc. All rights reserved.
引用
收藏
页码:808 / 821
页数:14
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