Optical waveguides in crystalline dielectric materials produced by femtosecond- laser micromachining

被引:631
|
作者
Chen, Feng [1 ,2 ]
Vazquez de Aldana, J. R. [3 ]
机构
[1] Shandong Univ, State Key Lab Crystal Mat, Sch Phys, Minist Educ, Jinan 250100, Peoples R China
[2] Shandong Univ, Key Lab Particle Phys & Particle Irradiat, Minist Educ, Jinan 250100, Peoples R China
[3] Univ Salamanca, Fac Ciencias, Laser Microproc Grp, E-37008 Salamanca, Spain
基金
中国国家自然科学基金;
关键词
Optical waveguides; femtosecond-laser micromachining; ultrafast laser inscription; optical crystals and ceramics; waveguide lasers; frequency converters; electro-optic modulators; EFFICIENT 2ND-HARMONIC GENERATION; LITHIUM-NIOBATE; SINGLE-CRYSTAL; FUSED-SILICA; BLUE-LIGHT; WRITTEN; FABRICATION; GLASS; INSCRIPTION; FLUORESCENCE;
D O I
10.1002/lpor.201300025
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Femtosecond-laser micromachining (also known as inscription or writing) has been developed as one of the most efficient techniques for direct three-dimensional microfabrication of transparent optical materials. In integrated photonics, by using direct writing of femtosecond/ultrafast laser pulses, optical waveguides can be produced in a wide variety of optical materials. With diverse parameters, the formed waveguides may possess different configurations. This paper focuses on crystalline dielectric materials, and is a review of the state-of-the-art in the fabrication, characterization and applications of femtosecond-laser micromachined waveguiding structures in optical crystals and ceramics. A brief outlook is presented by focusing on a few potential spotlights.
引用
收藏
页码:251 / 275
页数:25
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