Surface micromachined high-performance RF MEMS inductors

被引：18
|
作者：
Fang, Dong-Ming [1 ]
Zhou, Yong [1 ]
Wang, Xi-Ning [1 ]
Zhao, Xiao-Lin [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res inst MicroNano Sci & Technol, Shanghai 200030, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 01期
关键词：
D O I：
10.1007/s00542-006-0262-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
High-performance three-dimensional (3-D) microinductors with air-core and polyimide-core were fabricated by using simple MEMS technology. Both inductors have electroplated copper coils to minimize resistance to obtain high quality factor. The measurement results show that both inductors have high Q-factors over wide range of operating frequency. The maximum Q-factor of the polyimide-core is 36.5 and the inductance is 1.42 nH at 4.5 GHz, while the maximum Q-factor of the air-core inductor is 22.9 and the inductance is 1.17 nH at 5.5 GHz. The series resistance/parasitic capacitance of the polyimide-core inductor and air-core inductor is 1.05 Omega/1.07 pF and 1.82 Omega/0.57 pF respectively at the peak-Q frequency.
引用
收藏
页码：79 / 83
页数：5
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