Design and development of a micro polycrystalline diamond ball end mill for micro/nano freeform machining of hard and brittle materials

被引:45
|
作者
Cheng, X. [1 ]
Wang, Z. G. [1 ]
Nakamoto, K. [2 ]
Yamazaki, K. [1 ]
机构
[1] Univ Calif Davis, Dept Mech & Aerosp Engn, Davis, CA 95616 USA
[2] Sodick Co Ltd, Tsuzuki Ku, Yokohama, Kanagawa 2248522, Japan
关键词
MONOCRYSTALLINE SILICON; TOOL FABRICATION; WIRE EDM; SYSTEM; MOLDS;
D O I
10.1088/0960-1317/19/11/115022
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Micro end mills play a key role in micro/nano milling applications for intricate three-dimensional die/molds or sensors for micro-electro-mechanical systems (MEMS). In order to achieve higher machining accuracy and longer tool life, micro end mills are usually made of ultra-hard materials such as polycrystalline diamond (PCD) or cubic boron nitride (CBN). One of the best choices for their fabrication is the wire electrical discharge machining (WEDM) method. There are two basic categories of micro end mills, namely the ball end mill for 3D freeform surface machining and straight/round edge end mills for non-freeform surface machining. This paper focuses on the design and development of the micro ball end mill for hard and brittle materials. Firstly, the available typical ball end mill is analyzed. Secondly, a micro ball end mill with uniform axial rake and clearance angles is designed and analyzed by the finite element method (FEM). The designed micro ball end mill only needs simultaneously three linear and one index rotational WEDM axes instead of simultaneously five WEDM axes for traditional ball end mills. Then, micro PCD ball end mills are fabricated and the radius variation follows in +/- 2.0 mu m, which is more accurate than commercially available ones. Finally, the 3D freeform geometry milling on tungsten carbide (WC) and silicon wafer successfully demonstrated the possibility of micro-mechanical freeform machining by the developed micro ball end mill.
引用
收藏
页数:10
相关论文
共 50 条
  • [41] Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials
    Byiringiro, Jean Bosco
    Ko, Tae Jo
    Kim, Ho-Chan
    Lee, In Hwan
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2013, 14 (11) : 1989 - 1996
  • [42] Ductile-regime Machining for Fast Tool Servo Diamond Turning of Micro-structured Surfaces on Brittle Materials
    Yu, De Ping
    Wong, Yoke San
    Hong, Geok Soon
    ADVANCES IN MATERIALS PROCESSING X, 2012, 500 : 333 - +
  • [43] Structural design of groove and micro-blade of the end mill in aluminum alloys machining based on bionics
    Zhenxi Jiang
    Jie Sun
    Qingchun Xiong
    Liming Wang
    Jianfeng Li
    The International Journal of Advanced Manufacturing Technology, 2017, 88 : 3343 - 3356
  • [44] Structural design of groove and micro-blade of the end mill in aluminum alloys machining based on bionics
    Jiang, Zhenxi
    Sun, Jie
    Xiong, Qingchun
    Wang, Liming
    Li, Jianfeng
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2017, 88 (9-12): : 3343 - 3356
  • [45] Development of PCBN micro ball-end mill with multi-edge and spherical flank face
    Du, Yuchao
    Liang, Zhiqiang
    Ma, Yue
    Su, Zhipeng
    Chen, Rui
    Zhou, Tianfeng
    Wang, Xibin
    JOURNAL OF MANUFACTURING PROCESSES, 2022, 84 : 424 - 434
  • [46] Intelligent design and database development of micro-texture ball-end milling cutters
    Yang, Shucai
    Liu, Lukai
    Yu, Yang
    Han, Pei
    Zhang, Xiaohui
    Xing, Shiwen
    JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING, 2025, 47 (01)
  • [47] Fabrication of micro Ni-W electroplated diamond tools and their application to grooving of brittle materials - Improvement of tool quality and machining performance
    Onkura, Hiromichi
    Ohnishi, Osamu
    Nishihara, Kunio
    Kuo, Weichen
    Seimitsu Kogaku Kaishi, 2008, 6 (627-631):
  • [48] Investigation on machining performance of soft-brittle KDP crystals with surface micro-defects in the ball-end milling repairing process
    Lei, Hongqin
    Zhao, Linjie
    Cheng, Jian
    Chen, Mingjun
    Liu, Qi
    Wang, Jinghe
    Yang, Dinghuai
    Ding, Wenyu
    Chen, Guang
    Han, Chengshun
    SUSTAINABLE MATERIALS AND TECHNOLOGIES, 2024, 40
  • [49] CUTTING CHARACTERISTICS OF HARD-BRITTLE MATERIALS UNDER NANO/MICRO GROOVE CUTTING USING A V-SHAPE TOOL
    Masahiko, Yoshino
    Hao, Shen
    Nakagawa, Yuki
    Abdelkawy, Abdallah
    PROCEEDINGS OF THE JSME 2020 CONFERENCE ON LEADING EDGE MANUFACTURING/MATERIALS AND PROCESSING, LEMP2020, 2020,
  • [50] Micro- and nano-structural design strategies towards polycrystalline nickel-rich layered cathode materials
    Lin, Lili
    Zhang, Lihan
    Wang, Shuwei
    Kang, Feiyu
    Li, Baohua
    JOURNAL OF MATERIALS CHEMISTRY A, 2023, 11 (15) : 7867 - 7897