Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope

被引：15
|
作者：
Xiao, Q. -J. [1 ,2 ]
Li, S. -Y. [1 ]
Chen, W. -Y. [1 ]
Cui, F. [1 ]
Zhang, W. -P. [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Key Lab Thin Film & Microfabricat Minist Educ, Res Inst Micro Nano Sci & Technol, Shanghai, Peoples R China
[2] Zhaoqing Univ, Fac Elect & Informat, Zhaoqing, Peoples R China
来源：
ELECTRONICS LETTERS | 2009年 / 45卷 / 16期
基金：
高等学校博士学科点专项科研基金;
关键词：
3;
D O I：
10.1049/el.2009.0874
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel microgyroscope based on UV-LIGA technology is described, in which the wheel-like rotor is levitated and rotated by the electrostatic forces. A simple fuzzy logic scheme for online tuning of PI ( proportional integral) controller parameters to improve system robustness of initial levitation is outlined. Experimental results indicate that, with fuzzy tuning, the overshoot is reduced to 17% compared with 27% of the conventional PI controller. The rise time for the two channels of the four is 3.6 ms and the settle time is nearly 25.6 ms, which shows a quick response time and good steady-state performance. From the experiment of 0.5 g pulse acceleration input, sensitivity along axial direction is 1 V/g when it acts as an accelerometer.
引用
收藏
页码：818 / U23
页数：2
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