Design and Simulation of a Z-axis Dual Proof Mass Micromachined Gyroscope with Decoupled Oscillation Modes

In this paper, a Z-axis micromachined gyroscope with a new decoupled design was presented. The gyroscope consists of dual proof mass, sense frame and drive frame structure. The sense frame is constrained in the sense direction and anchored oil the Substrate, which minimize the influence from the motion of the proof mass in the drive direction. The drive frame is also restricted to oscillate in the drive direction. ANSYS has been used to make modal analysis and harmonic analysis to determine the vibration characteristics of the decoupled gyroscope. We introduce the decoupling ratio (eta(DtS)) of drive mode to sense mode and the decoupling ratio (eta(StD)) of sense mode to drive mode to determine the decoupling design. The results show that the drive mode and the sense mode are well decoupled.